Another new development is AMPERTEC® RD tungsten pentachloride, WCl5. This addition expands Taniobis’ portfolio to include a highly reactive form of tungsten that is utilized in coating processes. Another application is catalysis.

The significantly higher vapor pressure of tungsten pentachloride compared to WCl6 makes it a better choice for depositing tungsten metal layers through ALD/CVD techniques. Customers also use tungsten pentachloride to produce special tungsten(V) compounds for these techniques.

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